Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners

  title={Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners},
  author={Andrew J. Fleming and S. O. Reza Moheimani},
  journal={IEEE Transactions on Control Systems Technology},
Piezoelectric tube scanners are employed in high-resolution positioning applications such as scanning probe microscopy and nanofabrication. Much research has proceeded with the aim of reducing hysteresis and vibration-the two foremost problems associated with piezoelectric tube scanners. In this paper, two simple techniques are proposed for simultaneously reducing hysteresis and vibration: 1) A new dc accurate charge amplifier is shown to significantly reduce hysteresis while avoiding… CONTINUE READING
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