Sensitivity increase for coating thickness determination using THz waveguides.

@article{Theuer2010SensitivityIF,
  title={Sensitivity increase for coating thickness determination using THz waveguides.},
  author={Michael Theuer and Rene Beigang and D. Grischkowsky},
  journal={Optics express},
  year={2010},
  volume={18 11},
  pages={
          11456-63
        }
}
We report on layer thickness determination down to a thickness of 2.5 microns using terahertz waveguide spectroscopy. Compared to typical single-pass transmission measurements in the time domain, the effective THz pulse delay is considerably increased for a given layer thickness by using the high filling factor of the THz waveguide. This corresponds to a sensitivity increase up to a factor of 50 for the measured delay, allowing the direct measurement of layer thicknesses down to below… CONTINUE READING