Sensitivity and resolution of evanescent microwave microscope

  title={Sensitivity and resolution of evanescent microwave microscope},
  author={R. A. Kleismit and M. K. Kazimierczuk and Gregory Kozlowski},
  journal={IEEE Transactions on Microwave Theory and Techniques},
A near-field evanescent microwave microscope is based on a /spl lambda//4 coaxial TEM transmission-line resonator with a silver-plated tungsten tip extending through an end-wall aperture. This microwave microscope is used to characterize local electromagnetic properties of dielectrics, conductors, and superconductors. The resolution of the probe is verified experimentally by scanning etched gold lines on a sapphire substrate. A first-order sensitivity estimation generated from a unified… CONTINUE READING
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