Semiconductor Sensor Layer in SAW Gas Sensors Configuration

@inproceedings{Hejczyk2010SemiconductorSL,
  title={Semiconductor Sensor Layer in SAW Gas Sensors Configuration},
  author={Tomasz Hejczyk and Michał Urbańczyk and Wiesław P. Jakubik},
  year={2010}
}
A very interesting feature of the surface acoustic wave (SAW) sensors is the fact that the layered sensor structure on a piezoelectric substrate provides new possibilities for detecting gas in a SAW sensor system by using the acoustoelectric coupling between the surface wave and the free charges in semiconductor sensor layer. Using a surface acoustic wave surface with the dual delay line and an adequately chosen active layer creates possibilities for designing a sensor with high sensitivity and… CONTINUE READING

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