Self-shunted Nb/AlO/sub x//Nb Josephson junctions

@article{Patel1999SelfshuntedNX,
  title={Self-shunted Nb/AlO/sub x//Nb Josephson junctions},
  author={Vipul Patel and J. E. Lukens},
  journal={IEEE Transactions on Applied Superconductivity},
  year={1999},
  volume={9},
  pages={3247-3250}
}
We describe the fabrication and properties of high critical current density (J/sub c/) Nb/AlO/sub x//Nb Josephson junctions with deep-submicron dimensions. The junctions are fabricated using a planarized process in which all levels are patterned using a combination of optical and electron-beam lithography. The base and counter electrodes are defined by reactive ion etching using quartz etch masks to give a minimum feature size of 0.2 microns. For J/sub c/=2.1 mA//spl mu/m/sup 2/ and junction… CONTINUE READING

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