Self-organization of nanostructures on Si wafers using surface structure control

@inproceedings{Ogino1997SelforganizationON,
  title={Self-organization of nanostructures on Si wafers using surface structure control},
  author={Toshio Ogino},
  year={1997}
}
Abstract The final goal of nanofabrication on Si wafers is the high-density integration of atomically controlled structures on the wafer scale. This paper describes a scenario for nanointegration through the control of the self-organization processes on the Si surfaces. It is demonstrated here that atomic steps on Si(111) surfaces can be regularly rearranged by using a patterning-assisted control and that Ge quantum-dot networks can be self-ordered by controlling the surface structures… CONTINUE READING

Similar Papers

Citations

Publications citing this paper.