Self-limiting low-temperature growth of crystalline AlN thin fi lms by plasma-enhanced atomic layer deposition

@inproceedings{Ozgit2012SelflimitingLG,
  title={Self-limiting low-temperature growth of crystalline AlN thin fi lms by plasma-enhanced atomic layer deposition},
  author={Cagla Ozgit and Inci Donmez and Mustafa Alevli and Necmi Biyikli},
  year={2012}
}

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