Self-assembled out-of-plane high-Q integrated inductors

@article{Schuylenbergh2002SelfassembledOH,
  title={Self-assembled out-of-plane high-Q integrated inductors},
  author={K. van Schuylenbergh and C. L. Chua and D K Fork and J. Lu and Brian Griffiths},
  journal={Digest. International Electron Devices Meeting,},
  year={2002},
  pages={479-482}
}
Self-assembled high-quality (Q) factor, 3-D inductors were batch-fabricated. The out-of-plane geometry reduces eddy current and skin effect losses. Coils achieve Q-factors over 70 on both glass and 15-20 /spl Omega/-cm Si at 1 GHz. 3-D coil LC oscillators had 12.3 dB lower phase-noise versus spiral coils. Encapsulation affected neither phase noise nor Q-factor. 

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