Self Aligned Multi-Layer Electrodes with Nano-Gap for Fluidic and Magnetic Assembly of Carbon Nanotubes

Abstract

A self aligned nano scale gap between multiple metal layers has been fabricated using a newly developed technique of controlled undercut and metallization (CUM), and applied for the assembly of an individual carbon nanotube (CNT). The new method enables conventional optical lithography to fabricate nano-gap electrodes and self aligned patterns with nano… (More)

Topics

8 Figures and Tables

Slides referencing similar topics