Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation.

@article{Chen2011SelectiveTO,
  title={Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation.},
  author={Charlton J. Chen and Jiangjun Zheng and Tingyi Gu and James McMillan and Mingbin Yu and G. Q. Lo and Dim Lee Kwong and Chee Wei Wong},
  journal={Optics express},
  year={2011},
  volume={19 13},
  pages={
          12480-9
        }
}
We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning range of up to 8.7 nm is achieved with ∼ 30 mW laser powers. Over this tuning range, the cavity Qs decreases from 3.2×10(5) to 1.2×10(5). Numerical simulations model the temperature distributions in the silicon photonic… 

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