Scheduling and dispatching: a simulation study on release, synchronization, and dispatching in MEMS fabrication

Abstract

MEMS (microelectromechanical system) fabrication can be organized as three sub-processes, that is, the front-end process, the wafer cap process, and the back-end process. The coordination between the releases of raw wafers to the two parallel sub-processes, the front-end process, and the wafer cap process, is always an important issue. Previous research… (More)

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19 Figures and Tables