Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

@article{Pan2018SchedulingCT,
  title={Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges},
  author={ChunRong Pan and Mengchu Zhou and Yan Qiao and Naiqi Wu},
  journal={IEEE Transactions on Automation Science and Engineering},
  year={2018},
  volume={15},
  pages={586-601}
}
Cluster tools are automated robotic manufacturing systems containing multiple computer-controlled process modules. They have been increasingly used for wafer fabrication. This paper reviews the modeling and scheduling methods for cluster tools with both nonrevisiting and revisiting processes. For nonrevisiting processes, we focus on the modeling and… CONTINUE READING