Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

@article{Lee2014SchedulingCT,
  title={Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types},
  author={Jun-Ho Lee and Hyun-Jung Kim and Tae-Eog Lee},
  journal={IEEE Transactions on Automation Science and Engineering},
  year={2014},
  volume={11},
  pages={525-536}
}
We examine a scheduling problem of cluster tools that concurrently process two wafer types in a cyclic operational sequence. Whereas the process steps for different wafer types are assigned to different processing modules (PMs), the wafer loading and unloading tasks at the PMs are performed by a single robot. For a given cycle plan, which is a mix of different wafers for each cycle, we wish to determine the robot task sequence so as to minimize the tool cycle time. When a single wafer type is… CONTINUE READING
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