Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

@article{Kim2013SchedulingCT,
  title={Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots},
  author={Hyun-Jung Kim and Jun-Ho Lee and Chihyun Jung and Tae-Eog Lee},
  journal={IEEE Transactions on Automation Science and Engineering},
  year={2013},
  volume={10},
  pages={145-159}
}
In the semiconductor manufacturing industry, the lot size currently tends to be extremely small, even being only 5-8 wafers, whereas conventional lots have 25 identical wafers. The smaller lot size is made because customers demand extremely small lots, and the number of chips in a large 300 mm wafer has increased. Cyclic scheduling is not applicable for such small lot production because the number of identical work cycles accounts for a small proportion of scheduling as compared to the lengths… CONTINUE READING
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