Scheduling Algorithms for Minimizing Tardiness of Orders at the Burn-in Workstation in a Semiconductor Manufacturing System

Abstract

In this paper, we consider a scheduling problem in a semiconductor test facility. We focus on the burn-in workstation and its corresponding loading/unloading workstation, which may be considered bottleneck workstations in the test facility. In the burn-in workstation, there are parallel identical batch-processing machines, called chambers, while there are… (More)

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