Scanning frequency comb microscopy (SFCM): A new method showing promise for high-resolution carrier profiling in semiconductors

@article{Hagmann2014ScanningFC,
  title={Scanning frequency comb microscopy (SFCM): A new method showing promise for high-resolution carrier profiling in semiconductors},
  author={Mark J. Hagmann and Petru Andrei and Shashank Shekhar Pandey and Ajay Nahata},
  journal={25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014)},
  year={2014},
  pages={213-218}
}
A microwave frequency comb (MFC) with hundreds of measurable harmonics is superimposed on the DC tunneling current in a scanning tunneling microscope by focusing a mode-locked ultrafast laser on the tunneling junction. Two methods for carrier profiling of semiconductors by hyperspectral measurements with the MFC are considered. The first method, analogous… CONTINUE READING