Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals

@article{Xin2013ScanningCE,
  title={Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals},
  author={Huolin L. Xin and Christian Dwyer and David A. Muller and Haimei Zheng and Peter Ercius},
  journal={Microscopy and Microanalysis},
  year={2013},
  volume={19},
  pages={1036 - 1049}
}
Abstract Finding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliable reconstruction of materials with sub-10-nm resolution. Such a confocal geometry transfers… Expand
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