Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals

  title={Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals},
  author={Huolin L. Xin and Christian Dwyer and David A. Muller and Haimei Zheng and Peter Ercius},
  journal={Microscopy and Microanalysis},
  pages={1036 - 1049}
Abstract Finding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliable reconstruction of materials with sub-10-nm resolution. Such a confocal geometry transfers… Expand
6 Citations
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Electron Tomography: A Three-Dimensional Analytic Tool for Hard and Soft Materials Research.
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Extended Depth of Field for High-Resolution Scanning Transmission Electron Microscopy
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Depth sectioning in scanning transmission electron microscopy based on core-loss spectroscopy.
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Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, part II: inelastic scattering.
Comparisons with scanning transmission electron microscopy (STEM) are made showing that SCEM will improve both the lateral and depth resolution relative to STEM, and the expected poor resolution of STEM depth sectioning for extended objects is overcome in the SCEM geometry. Expand
Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope.
It is shown that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. Expand
The Three-Dimensional Point Spread Function of Aberration-Corrected Scanning Transmission Electron Microscopy
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Three-Dimensional Imaging in Aberration-Corrected Electron Microscopes
  • H. Xin, D. Muller
  • Medicine, Materials Science
  • Microscopy and Microanalysis
  • 2010
A 3D phase contrast model for coherent- SCEM as well as a pictorial way to find boundaries of information transfer in reciprocal space are reviewed and applied to both BF- and ADF-SCEM to study their 3D point spread functions and contrast transfer functions (CTFs). Expand
Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope
It is found that deconvolution methods generally have limited usefulness in this case, but that three-dimensional information can still be obtained with the aid of prior information for specific samples such as those consisting of supported nanoparticles. Expand
Depth sectioning of individual dopant atoms with aberration-corrected scanning transmission electron microscopy
The ability to detect individual impurity atoms has been greatly enhanced by the development of aberration-corrected electron microscopes. The reduced depth of focus potentially enablesExpand
Aberration-corrected ADF-STEM depth sectioning and prospects for reliable 3D imaging in S/TEM.
  • H. Xin, D. Muller
  • Materials Science, Medicine
  • Journal of electron microscopy
  • 2009
Depth-sectioning experiments using a 33-mrad 100 keV C(5)-corrected aberration-corrected STEM demonstrate the elongation effect and the missing-cone problem in real and reciprocal space and the performance limits of different S/TEM-based imaging modes are compared. Expand
Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.
It is demonstrated that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope, and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Expand