Scaling Limits of Electrostatic Nanorelays

@article{Pawashe2013ScalingLO,
  title={Scaling Limits of Electrostatic Nanorelays},
  author={Chytra Pawashe and Kevin L. Lin and Kelin J. Kuhn},
  journal={IEEE Transactions on Electron Devices},
  year={2013},
  volume={60},
  pages={2936-2942}
}
A model to explore the scaling limits of electrostatically actuated nanorelays is presented, which shows that adhesion in a nanorelay's contact interface limits its performance with respect to operating voltage, contact resistance, and switching energy. For logic applications, we show that an ultimately scaled relay can be more efficient than conventional metal-oxide-semiconductor devices if (1) it is designed with very high contact resistances, leading to ≈ 1-MHz operation due to large RC… CONTINUE READING
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