Scaling Behaviour of Pressure-Driven Micro-Hydraulic Systems

  title={Scaling Behaviour of Pressure-Driven Micro-Hydraulic Systems},
  author={N. R. Tas and Theo S. J. Lammerink and J. W. Berenschot and Miko Elwenspoek and A. van den Berg},
This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An… CONTINUE READING