Scalable method for the fabrication and testing of glass-filled, three-dimensionally sculpted extraordinary transmission apertures.

@article{Walavalkar2014ScalableMF,
  title={Scalable method for the fabrication and testing of glass-filled, three-dimensionally sculpted extraordinary transmission apertures.},
  author={Sameer S. Walavalkar and Pawel M. Latawiec and Andrew P. Homyk and And Axel Scherer},
  journal={Nano letters},
  year={2014},
  volume={14 1},
  pages={
          311-7
        }
}
This Letter features a new, scalable fabrication method and experimental characterization of glass-filled apertures exhibiting extraordinary transmission. These apertures are fabricated with sizes, aspect ratios, shapes, and side-wall profiles previously impossible to create. The fabrication method presented utilizes top-down lithography to etch silicon nanostructures. These nanostructures are oxidized to provide a transparent template for the deposition of a plasmonic metal. Gold is deposited… CONTINUE READING

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