Scalable Talbot lithography with an extreme ultraviolet table top laser

Abstract

We present a size scalable nano-patterning scheme based on the Talbot effect with extreme ultraviolet laser illumination. 

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Cite this paper

@article{Urbanski2011ScalableTL, title={Scalable Talbot lithography with an extreme ultraviolet table top laser}, author={L. Urbanski and P. W. Wachulak and A. Isoyan and Aaron Stein and C. S. Menoni and J. J. Rocca and M. C. Marconi}, journal={IEEE Photonic Society 24th Annual Meeting}, year={2011}, pages={839-840} }