Scalable Fabrication of Atomically Thin Monolayer MoS2 Photodetectors

  title={Scalable Fabrication of Atomically Thin Monolayer MoS2 Photodetectors},
  author={Alexander E. Yore and Kirby K. H. Smithe and Sauraj Jha and Kyle Ray and Eric Pop and A. K. M. Newaz},
Scalable fabrication of high quality photodetectors derived from synthetically grown monolayer transition metal dichalcogenides is highly desired and important for wide range of nanophotonics applications. We present here scalable fabrication of monolayer MoS2 photodetectors on sapphire substrates through an efficient process, which includes growing large scale monolayer MoS2 via chemical vapor deposition (CVD), and multi-step optical lithography for device patterning and high quality metal… 
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