Sampling process information from unstructured data

Abstract

Process Data Management and information governance are important tasks in product engineering. Formal process descriptions, quick access to technology data, check for consistent process flows, and the easy reuse of technology data are the main drivers of these developments. This paper introduces new methods for systematically collecting and storing… (More)

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@article{Popp2011SamplingPI, title={Sampling process information from unstructured data}, author={J{\"u}rgen Popp and Dirk Ortloff and T. Schmidt and Karin M E Hahn and Melanie Mielke and Roman Bruck}, journal={2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference}, year={2011}, pages={1-6} }