Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors

@article{Calvagno2012SamplePM,
  title={Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors},
  author={Giancarlo Calvagno and Giuseppe Muni and Andrea Jossa and Domenico Mello},
  journal={Microelectronics Reliability},
  year={2012},
  volume={52},
  pages={2064-2067}
}