Safety Considerations for Ion Implanters

  • Steven Robergea, Heiner Rysselb, Bob Brownd
  • Published 2008

Abstract

Ion implanters have several inherent hazards associated with their operation and maintenance. Although manufacturers of this equipment include numerous safety features into the design, the potential for serious injury or incident remains, particularly in situations where design safety features are overidden or recommended safe operating procedures are not… (More)

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