SUPREM 3.5-process modeling of GaAs integrated circuit technology

Abstract

A computer program, SUPREM 3.5, has been developed to simulate processes used to manufacture ion implanted GaAs integrated circuits. The processes modeled in the present version of the simulator include ion implantation, diffusion, and activation. The simulator also includes a routine to calculate the threshold voltage of a MESFET device based on the… (More)
DOI: 10.1109/43.35546

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