SU-8 2002 Surface Micromachined Deformable Membrane Mirrors

  title={SU-8 2002 Surface Micromachined Deformable Membrane Mirrors},
  author={Sarah J Lukes and D. L. Dickensheets},
  journal={Journal of Microelectromechanical Systems},
This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for electronic focus and aberration control in imaging systems, and exhibit a large range of motion and high optical quality. The processes result in free-standing membrane mirrors with in-plane film stress as low as 12.5 MPa while attaining well-defined… CONTINUE READING
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Processing of thin SU-8 films

  • S. Keller, G. Blagoi, M. Lillemose, D. Haefliger, A. Boisen
  • J. Micromech. Microeng., vol. 18, no. 12, pp…
  • 2008
Highly Influential
20 Excerpts

Eigenfrequencies of an elliptic membrane

  • B. A. Troesch, H. R. Troesch
  • Math. Comput., vol. 27, no. 124, pp. 755–765, Oct…
  • 1973
Highly Influential
2 Excerpts

The effect of soft bake temperature on the polymerization of SU-8 photoresist

  • T. A. Anhoj, A. M. Jorgensen, D. A. Zauner, J. Hubner
  • J. Micromech. Microeng., vol. 16, no. 9, pp. 1819…
  • 1819
Highly Influential
4 Excerpts

Design and fabrication of an electrostatically actuated microdeformable focusing mirror

  • M. J. Lin, K. W. Wu
  • J. Micro/Nanolithogr., J. Microelectromech. Syst…
  • 2011
1 Excerpt

Feedback - stabilized deformable membrane mirrors for focus control

  • P. A. Himmer, E. J. Moog, S. R. Shaw, D. L. Dickensheets
  • Proc . IEEE Int . Conf . OMN
  • 2011

MOEMS deformable mirrors for focus control in vital microscopy

  • M. J. Moghimi, B. J. Lutzenberger, B. M. Kaylor, D. L. Dickensheets
  • J. Micro/Nanolithogr., J. Microelectromech. Syst…
  • 2011
2 Excerpts

SU-8 focus control mirrors released by XeF2 dry etch

  • S. J. Lukes, D. L. Dickensheets
  • Proc. SPIE MOEMS Miniaturized Systems X, San…
  • 2011
2 Excerpts

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