SOI and Engineered-SOI, ideal platforms for building MEMS

@article{Assaderaghi2013SOIAE,
  title={SOI and Engineered-SOI, ideal platforms for building MEMS},
  author={Fari Assaderaghi},
  journal={2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)},
  year={2013},
  pages={1-2}
}
  • Fari Assaderaghi
  • Published 2013 in
    2013 IEEE SOI-3D-Subthreshold Microelectronics…
MEMS (Micro-Electro-Mechanical Systems) have been developed over the past 40 years with ink jet, pressure sensor and accelerometers driving the technology. The last decade has particularly witnessed a tremendous commercial success of MEMS, addressing a plethora of functions such as screen orientation, gesture recognition, timing, voice input and location… CONTINUE READING