SLID-ICV Vertical Integration Technology for the ATLAS Pixel Upgrades

  title={SLID-ICV Vertical Integration Technology for the ATLAS Pixel Upgrades},
  author={Anna Macchiolo and Ladislav Andricek and H-G. Moser and Richard Nisius and Rainer Helmut Richter and Philipp Weigell},
  journal={Physics Procedia},

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