SLID-ICV Vertical Integration Technology for the ATLAS Pixel Upgrades

@article{Macchiolo2012SLIDICVVI,
  title={SLID-ICV Vertical Integration Technology for the ATLAS Pixel Upgrades},
  author={Anna Macchiolo and Ladislav Andricek and H-G. Moser and Richard Nisius and Rainer Helmut Richter and Philipp Weigell},
  journal={Physics Procedia},
  year={2012},
  volume={37},
  pages={1009-1015}
}

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