SEM Image-Based 3-D Nanomanipulation Information Extraction and Closed-Loop Probe Control

@article{Li2014SEMI3,
  title={SEM Image-Based 3-D Nanomanipulation Information Extraction and Closed-Loop Probe Control},
  author={Dongjie Li and Weibin Rong and Jian Song and Lining Sun and Bo You and Debao Wang},
  journal={IEEE Transactions on Nanotechnology},
  year={2014},
  volume={13},
  pages={1194-1203}
}
To achieve a scanning electron microscope (SEM) and virtual reality-based nanomanipulation system, this paper addresses 3-D nanomanipulation information extraction based on 2-D SEM images, after briefly explaining how to establish the 3-D virtual environment. An image border repair algorithm based on an eight-neighboring method is proposed to obtain the accurate 2-D coordinates of the probe and nanowire even when they are in contact. To determine the coordinates of the Z probe, a method based… CONTINUE READING