Run-torun Control and Performance Monitoring of Overlay in Semiconductor Manufacturing

@inproceedings{Bode2002RuntorunCA,
  title={Run-torun Control and Performance Monitoring of Overlay in Semiconductor Manufacturing},
  author={Christopher A. Bode and Bum Suk Ko and Thomas F. Edgar},
  year={2002}
}
Advanced Micro Devices Exxon-Mobil Department of Chemical Engineering Austin, TX 78741 Baton Rouge, LA 70806 University of Texas at Austin U.S.A. U.S.A. Austin, TX 78712-1062 U.S.A. Abstract In the manufacture of semiconductor products, overlay is one of the most critical design specifications. Overlay is the position of a pattern relative to underlying layers, and overlay control largely determines the minimum feature size that may be incorporated into semiconductor device designs. Overlay… CONTINUE READING
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