Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method.

@article{Li2015RoughnessRO,
  title={Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method.},
  author={Zizheng Li and Jinsong Gao and Haigui Yang and Tongtong Wang and Xiaoyi Wang},
  journal={Optics express},
  year={2015},
  volume={23 18},
  pages={23738-47}
}
Generally, echelle grating ruling is performed on a thick Al film. Consequently, high-quality large-area thick Al films preparation becomes one of the most important factors to realize a high-performance large-size echelle grating. In this paper, we propose a novel multi-step deposition process to improve thick Al films quality. Compared with the… CONTINUE READING