Roughness analysis of optical surfaces by x-ray scattering


A grazing incidence x-ray scattering (XRS) method, Order perturbation theory (FOPT), is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced, which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree, as the x-ray… (More)

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