Roughness analysis of optical surfaces by x-ray scattering

Abstract

A grazing incidence x-ray scattering (XRS) method, Order perturbation theory (FOPT), is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced, which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree, as the x-ray… (More)

7 Figures and Tables

Topics

  • Presentations referencing similar topics