Rotary Liquid Droplet Microbearing

  title={Rotary Liquid Droplet Microbearing},
  author={Brian Yoxall and M. L. Chan and Ryan S. Harake and Tingrui Pan and D. A. Horsley},
  journal={Journal of Microelectromechanical Systems},
A rotational stage with a 10-mm-diameter single-crystal silicon rotor supported by liquid droplet ball bearings is described. The 100-300-μm-thickness droplet bearings are retained on the rotor surface with a micropatterned amorphous-flouropolymer-based superhydrophobic (SHP) surface coating that yields a 156° contact angle. The droplets slide on a SHP bearing raceway that is formed from laser-roughened poly-dimethylsiloxane (PDMS) on the surface of the stator, achieving a 10°-contact-angle… CONTINUE READING


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