Room temperature deposition of ZnO and Al:ZnO ultrathin films on glass and PET substrates by DC sputtering technique

  title={Room temperature deposition of ZnO and Al:ZnO ultrathin films on glass and PET substrates by DC sputtering technique},
  author={Mohammed Rasheed and R{\'e}gis Barill{\'e}},
  journal={Optical and Quantum Electronics},
In the present work, ultrathin films of Zinc oxide (ZnO) and Aluminum doped zinc oxide (AZO) with 20 nm thick were fabricated at 300 K on glass and Polyethylene terephthalate (PET) substrates by means of direct-current sputtering method. The structural morphology of the films were analyzed by (XRD) diffractometry. The average transmittance of films deposited on different substrates showed high transparency (over 80%) in the visible spectrum. The objective of the present work is to investigate… 

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