Role of the piezoelectric effect in device uniformity of GaAs integrated circuits

@inproceedings{Chang1984RoleOT,
  title={Role of the piezoelectric effect in device uniformity of GaAs integrated circuits},
  author={Mau-Chung Frank Chang and Chien-Ping Lee and Peter M. Asbeck and Richard P. Vahrenkamp and Conilee G. Kirkpatrick},
  year={1984}
}