Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit

@article{Yazdi2003RobustSC,
  title={Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit},
  author={Navid Yazdi and H. Sane and T. D. Kudrle and C J Mastrangelo},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={2},
  pages={1450-1453 vol.2}
}
This paper presents high-resolution control of torsional electrostatic micromirrors beyond their inherent pull-in instability using robust sliding-mode control (SMC). SMC enables compact realization of a robust controller tolerant of device characteristic variations, non-linearities, and many types of inherent instabilities. Robustness of the control loop is demonstrated through extensive simulations and measurements on MEMS with a wide range in their characteristics. Control of two-axis… CONTINUE READING
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