Robust and Postless Air-Suspended High Q Integrated Inductors on Silicon

@article{Cheon2012RobustAP,
  title={Robust and Postless Air-Suspended High Q Integrated Inductors on Silicon},
  author={Seongjong Cheon and Minkyu Yoon and Hyeonsu Park and Jaeyeong Park},
  journal={IEEE Transactions on Magnetics},
  year={2012},
  volume={48},
  pages={4131-4134}
}
In this paper, integrated air-suspended inductors were newly developed on silicon substrate for on-chip radio frequency (RF) circuit and system applications. For the improvement of Q-factors and self-resonant frequencies of the integrated inductors, they were designed and fabricated by using air-suspended spiral conductor lines, photoresist sacrificial layer, and electroplating technique. For forming the air-suspended conductor lines without selectively etching the substrate and using any metal… CONTINUE READING