Robust adaptive tracking control of electrostatic micro-actuators with uncertainty

  title={Robust adaptive tracking control of electrostatic micro-actuators with uncertainty},
  author={Wenlei Li and P. X. Liu},
  journal={2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
In this paper, a novel adaptive robust tracking control scheme for a class of single-degree-of-freedom (1DOF) electrostatic micro-actuator systems with constant parameter uncertainties and external disturbances is addressed. This control method is based on backstepping control technique and Nussbaum gain function. The derived adaptive robust controller guarantees that the closed-loop system is globally and uniformly bounded, and the tracking error is convergent to a small neighbourhood of zero… CONTINUE READING
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A General Modeling and Control Framework for Electrostatically Actuated Mechanical Systems

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Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback

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