Robust MEMS Gyroscope Based on Thermal Principles

  title={Robust MEMS Gyroscope Based on Thermal Principles},
  author={Jamal Bahari and Rui Feng and Albert M. Leung},
  journal={Journal of Microelectromechanical Systems},
Two variants of a novel single-axis thermal gyroscope without seismic mass are designed, fabricated, and characterized in this paper. The operating principle of the device is differential temperature detection due to the Coriolis effect on an oscillatory gas stream created by alternating two resistive microheaters. The fabrication process is based on a bulk micromachining technology on a silicon substrate using platinum as the only conductor layer. The device structure consists of two resistive… CONTINUE READING
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Design and analysis of a micromachined gyroscope

  • N. Zarei, A. Leung, J. D. Jones
  • presented at the SPIE, San Francisco, CA, USA…
  • 2012
2 Excerpts

Modeling a novel MEMS gyroscope

  • N. Zarei, A. Leung, J. Jones
  • presented at the 221st ECS Meeting, Seattle, WA…
  • 2012
2 Excerpts

Spurious signals in the thermal MEMS gyroscope

  • P. Shooshtari, J. Bahari, K. Khosraviani, A. M. Leung, J. Jones
  • presented at the ASME Int. Mech. Eng. Cong. Expo…
  • 2012
1 Excerpt

“ A critical review of MEMS gyroscopes technology and commercialization status . ” [ Online ]

  • F. Ayazi N. Yazdi, K. Najafi
  • 2012

Low-cost thermal MEMS gyroscope

  • A. M. Leung
  • Proc. Hilton Head Workshop Solid-State Sensors…
  • 2010
2 Excerpts

The development of micro-gyroscope technology

  • K. Liu, W. Zhang, +6 authors Q. Xiao
  • J. Micromech. Microeng., vol. 19, pp. 1–29, Nov…
  • 2009
3 Excerpts

Micromachined gas inertial sensor based on convection heat transfer

  • R. Zhu, H. Ding, Y. Su, Z. Zhou
  • Sens. Actuators, vol. 130–131, pp. 68–74, Aug…
  • 2006
2 Excerpts

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