Robust MEMS Gyroscope Based on Thermal Principles

@article{Bahari2014RobustMG,
  title={Robust MEMS Gyroscope Based on Thermal Principles},
  author={Jamal Bahari and Rui Feng and Albert M. Leung},
  journal={Journal of Microelectromechanical Systems},
  year={2014},
  volume={23},
  pages={100-116}
}
Two variants of a novel single-axis thermal gyroscope without seismic mass are designed, fabricated, and characterized in this paper. The operating principle of the device is differential temperature detection due to the Coriolis effect on an oscillatory gas stream created by alternating two resistive microheaters. The fabrication process is based on a bulk micromachining technology on a silicon substrate using platinum as the only conductor layer. The device structure consists of two resistive… CONTINUE READING
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