Robust H∞ control in nano-positioning

  title={Robust H∞ control in nano-positioning},
  author={Ning Chunag and Ian R. Petersen},
  journal={2010 IEEE International Conference on Control Applications},
This paper considers the use of robust H∞ tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H∞ controller yields accurate tracking of displacement and also significantly reduces the hysteresis. 


Publications citing this paper.
Showing 1-4 of 4 extracted citations

A robust extended Kalman filter for modeling piezoelectric actuators

2016 American Control Conference (ACC) • 2016
View 9 Excerpts
Highly Influenced

An improved AFM model in z-direction with dynamics-coupling effect

2012 2nd Australian Control Conference • 2012
View 2 Excerpts

Robust H∞ control in fast atomic force microscopy

Proceedings of the 2011 American Control Conference • 2011
View 5 Excerpts


Publications referenced by this paper.
Showing 1-10 of 17 references

Robust H∞ Control for Linear Systems with Norm-bounded Time-Varying Uncertainty

L. Xie, C. E. de Souza
IEEE Transactions on Automatic Control, • 1992
View 5 Excerpts
Highly Influenced

and C

L. Xie, M. Fu
E. de Souza, Robust H∞ Control and Quadratic Stabilization of Systems with Parameter Uncertainty Via Output Feedback. IEEE Transactions on Automatic Control, Vol.37(8), pp. 1253-1256 • 1992
View 6 Excerpts
Highly Influenced

Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes

K. K. Leang, S. Devasia
Mechatronics, Vol.16(3-4), pp. 141-158 • 2006
View 1 Excerpt

Design methodologies for robust nano-positioning

IEEE Transactions on Control Systems Technology • 2005
View 1 Excerpt

Hysteresis and creep compensation for piezoelectric actuator in open-loop operation

C. Ru, L. Sun
Sensors and Actuators, Vol.122(A), pp. 124-130 • 2005
View 3 Excerpts

Similar Papers

Loading similar papers…