Robust H<sup>&#x221E;</sup> control in nano-positioning

Abstract

This paper considers the use of robust H<sup>&#x221E;</sup> tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H<sup… (More)
DOI: 10.1109/CCA.2010.5611252

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