Robust Capacity Planning in Semiconductor Manufacturing

  title={Robust Capacity Planning in Semiconductor Manufacturing},
  author={Stuart Bermon and Sarah HoodyAugust},
We present a stochastic programming approach to capacity planning under demand uncertainty in semiconductor manufacturing. Given multiple demand scenarios together with associated probabilities, our aim is to identify a set of tools that is a good compromise for all these scenarios. More precisely, we formulate a mixed-integer program in which expected value of the unmet demand is minimized subject to capacity and budget constraints. This is a difficult two-stage stochastic mixed-integer… CONTINUE READING
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