Rigorous coupled-wave analysis for multilayered grating structures

@inproceedings{Lee2003RigorousCA,
  title={Rigorous coupled-wave analysis for multilayered grating structures},
  author={Wonhee Lee and F. Levent Degertekin},
  booktitle={SPIE OPTO},
  year={2003}
}
A numerically stable and systematic implementation of the rigorous coupled-wave analysis (RCWA) for the general multilayered grating structures is presented for both TE and TM modes. Numerical results of the approach are shown for the diffraction-based optical device as an example and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar analysis. 

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