Review of radio frequency microelectromechanical systems technology - Science, Measurement and Technology, IEE Proceedings-

  • Published 2001


A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked… (More)


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