Resonant frequency method for monitoring MEMS fabrication

@inproceedings{Tanner2003ResonantFM,
  title={Resonant frequency method for monitoring MEMS fabrication},
  author={D. M. Tanner and A. Herbert Coppola Owen and Fredd Rodriguez},
  year={2003}
}
MEMS surface-micromachining fabrication requires the use of many different tools to deposit thin-films, precisely define patterns using typical photolithography, and perform etching processes. As with any fabrication process there is inherent variation, which is acceptable when controlled within suitable limits. The ability to monitor and respond to this variation is paramount in maintaining a viable fabrication process. Electrostatic comb-drive resonators are candidate test structures used to… CONTINUE READING

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