Resonant MEMS microsensor for the measurement of fluid density and viscosity

@inproceedings{Vancauwenberghe2004ResonantMM,
  title={Resonant MEMS microsensor for the measurement of fluid density and viscosity},
  author={Olivier Vancauwenberghe and Anthony R. H. Goodwin and Eric Paul Donzier and M. Serranilla Manrique and Fr{\'e}d{\'e}ric Marty},
  year={2004}
}
A resonant MEMS microsensor was developed to measure fluid density and viscosity. It consists of a thin plate made of a SOI top layer vibrating at resonance in its first bending mode. Its working principle is based on the resonance frequency and quality factor affected by the surrounding fluid density and viscosity. Measurements have been done in a series of gases and liquids at different pressures and temperatures. The resonant MEMS is able to measure densities to ± 1% in the range of 1 to… CONTINUE READING

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