Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum.


Determining the resolution of a zone plate X-ray microscope is a complicated issue, depending on many factors in addition to the quality of the optic. These include the degree of coherence of the illumination, the illumination spectrum, and the nature of the resolution test object. In this paper, we examine closely how the degree of coherence of the… (More)