Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques

@article{Juillard2006ResolutionLF,
  title={Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques},
  author={J{\'e}r{\^o}me Juillard and {\'E}ric Colinet and Manuel Dom{\'i}nguez Pumar and Joan Pons-Nin and Jordi Ricart},
  journal={CoRR},
  year={2006},
  volume={abs/0711.3291}
}
This paper is devoted to the analysis of resonant MEMS sensors based on discrete relay feedback techniques. One drawback of such techniques is that some synchronization usually occurs between the discrete part and the continuous part of the system: this results in sensor responses that are very similar to the curves known as devil’s staircases, i.e. the oscillation frequency does not vary smoothly with the sensor's natural pulsation. The main contribution of this paper is a theoretical… CONTINUE READING

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References

Publications referenced by this paper.
Showing 1-10 of 11 references

Analysis of the Σ∆ Pulsed Digital Oscillator (PDO) for MEMS

  • M. Dominguez, J. Pons, J. Ricart, A. Bermejo, E. Figueras, M. Morata
  • IEEE Transactions on Circuit and Systems I…
  • 2006
Highly Influential
10 Excerpts

Actuation of resonant MEMS using short pulsed forces

  • E. Colinet, J. Juillard, S. Guessab, R. Kielbasa
  • Sensors and Actuators, vol. A115, n. 1, pp. 118…
  • 2004
Highly Influential
12 Excerpts

Asymptotic properties of mixedsignal relay feedback systems

  • J. Juillard, E. Colinet
  • IEEE Transactions on Circuits and Systems I…
Highly Influential
7 Excerpts

Tsypkin, “Relay control systems

  • Y Z.
  • 1984
Highly Influential
4 Excerpts

Simple resonating microstructures for gas pressure measurement

  • K. Browns, W. Allegretto, F. E. Vermeulen, A. M. Robinson
  • Journal of Micromechanics and Microengineering…
  • 2002

Burst technology with feedback-loop control for capacitive detection and electrostatic excitation of resonant silicon sensors

  • T. Corman, K. Noren, P. Enoksson, J. Melin, G. Stemme
  • IEEE Transactions on Electronic Devices, vol. 47…
  • 2000

The effect of integrator leak in sigma-delta modulation

  • O. Feely, L. O. Chua
  • IEEE Transactions on Circuits and Systems I, vol…
  • 1991
2 Excerpts

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