Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques

  title={Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques},
  author={J{\'e}r{\^o}me Juillard and {\'E}ric Colinet and Manuel Dom{\'i}nguez Pumar and Joan Pons-Nin and Jordi Ricart},
This paper is devoted to the analysis of resonant MEMS sensors based on discrete relay feedback techniques. One drawback of such techniques is that some synchronization usually occurs between the discrete part and the continuous part of the system: this results in sensor responses that are very similar to the curves known as devil’s staircases, i.e. the oscillation frequency does not vary smoothly with the sensor's natural pulsation. The main contribution of this paper is a theoretical… CONTINUE READING

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