Resistance Calculation from Mask Artwork Data by Finite Element Method

  title={Resistance Calculation from Mask Artwork Data by Finite Element Method},
  author={Erich Barke},
  journal={22nd ACM/IEEE Design Automation Conference},
Traditional methods for resistance calculation suffer from some unfavourable features, that make them uncomfortable to use. Although requiring a lot of manual processing, they are rather inaccurate and often claim for severe artwork restrictions (e.g. orthogonal geometry)which conflict with the desire for most dense layouts. This paper describes a resistance calculation program called REX (Resistance Extractor), which is based on the well-known Finite Element Method (FEM). Highly felxible in… CONTINUE READING


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